Shaking was also felt as far away as the Bolivian capital of La Paz, 120 miles to the northeast.
The U.S. Geological Survey said the quake struck at just past 6:00 a.m. local time from an epicenter about 66 miles northeast of Arica, Chile, at a depth of 61 miles.
Hundreds of people are reported to have rushed into the streets of Arica when the quake struck about an hour before sunrise.
The governor of the affected Tarapaca region, Jose Durana, said walls fell in some areas and roads were blocked by landslides unleashed by the shaking.
Despite the damage, there were no reports of significant injuries or casualties linked to the quake.